晶 圓 清洗機

SPIN WASHING WITH Branson`s Ultrasound

影片網止： http://youtu.be/rABZLu76RaQ

Remove efficiency reaches 100% on specific micro-particles:

 Bare glass       Brush              6μm,OM 200x , 3 times /square

                        Two-fluid          2μm,OM 400x , 5 times /square

                        Megasonic          0.5μm,OM 1000x , 10 times /square

Silver pattern     Two-fluid          2μm,OM 400x , 5 times /square

                        Megasonic          0.5μm,OM 1000x , 10 times /square